JPH053536B2 - - Google Patents

Info

Publication number
JPH053536B2
JPH053536B2 JP59117425A JP11742584A JPH053536B2 JP H053536 B2 JPH053536 B2 JP H053536B2 JP 59117425 A JP59117425 A JP 59117425A JP 11742584 A JP11742584 A JP 11742584A JP H053536 B2 JPH053536 B2 JP H053536B2
Authority
JP
Japan
Prior art keywords
force sensor
beams
beam structure
vibrating
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59117425A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6069528A (ja
Inventor
Jooji Kaaman Richaado
Maachin Rangudon Rojaa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JENERARU EREKUTORITSUKU CO PLC ZA
Original Assignee
JENERARU EREKUTORITSUKU CO PLC ZA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JENERARU EREKUTORITSUKU CO PLC ZA filed Critical JENERARU EREKUTORITSUKU CO PLC ZA
Publication of JPS6069528A publication Critical patent/JPS6069528A/ja
Publication of JPH053536B2 publication Critical patent/JPH053536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Gyroscopes (AREA)
JP59117425A 1983-06-07 1984-06-07 振動ビーム式力感知器のビーム構造体 Granted JPS6069528A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB08315565A GB2141231B (en) 1983-06-07 1983-06-07 Force sensors
GB8315565 1983-06-07

Publications (2)

Publication Number Publication Date
JPS6069528A JPS6069528A (ja) 1985-04-20
JPH053536B2 true JPH053536B2 (en]) 1993-01-18

Family

ID=10543901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59117425A Granted JPS6069528A (ja) 1983-06-07 1984-06-07 振動ビーム式力感知器のビーム構造体

Country Status (5)

Country Link
US (1) US4594898A (en])
EP (1) EP0130705B1 (en])
JP (1) JPS6069528A (en])
DE (1) DE3480425D1 (en])
GB (1) GB2141231B (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010109787A1 (ja) * 2009-03-27 2010-09-30 パナソニック株式会社 物理量センサ

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6255136U (en]) * 1985-09-27 1987-04-06
US4751849A (en) * 1986-06-17 1988-06-21 Paroscientific, Inc. Force-sensitive resonator load cell
GB2196120A (en) * 1986-10-10 1988-04-20 Gen Electric Co Plc A resonant element force sensor in a housing affording temperature and pressure compensation
IL80550A0 (en) * 1986-11-07 1987-02-27 Israel Aircraft Ind Ltd Resonant element force transducer for acceleration sensing
US4878385A (en) * 1988-02-02 1989-11-07 Fisher Controls International, Inc. Differential pressure sensing apparatus
GB2215053B (en) * 1988-02-13 1991-09-11 Stc Plc Transducer device
GB8806214D0 (en) * 1988-03-16 1988-04-13 Avery Ltd W & T Vibrating force sensor
FR2638519B1 (fr) * 1988-11-02 1990-12-28 Asulab Sa Dispositif de mesure d'une grandeur physique
FR2640045B1 (fr) * 1988-12-02 1991-03-08 Sagem Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
US5060526A (en) * 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element
US5036715A (en) * 1989-06-30 1991-08-06 Richard Hanson Cantilevered force sensing assembly utilizing one or two resonating force sensing devices
HU212353B (en) * 1990-02-22 1996-06-28 Istvan Almasi Path-frequency signal transducer
FR2669426B1 (fr) * 1990-11-16 1993-10-29 Onera Transducteur de force a poutre vibrante piezoelectrique pour capteur accelerometrique.
US5095763A (en) * 1990-12-03 1992-03-17 Delatorre Leroy C Load-sensitive resonator beam transducer
US5201224A (en) * 1991-05-03 1993-04-13 Fmc Corporation Apparatus and method for sensing unbalance force and location through frequency modulation
WO1993010428A1 (en) * 1991-11-12 1993-05-27 Masstech Scientific Pty. Ltd. Force or load sensors
US5962786A (en) * 1995-09-26 1999-10-05 Onera (Office National D'eudes Et De Recheres Aerospatiales) Monolithic accelerometric transducer
DE69522721T2 (de) * 1995-09-29 2002-07-04 International Business Machines Corp., Armonk Mechanischer signalprozessor auf basis von mikromechanischen oszillatoren und intelligenten akustischen detektoren und darauf aufgebaute systeme
GB0116393D0 (en) * 2001-07-05 2001-08-29 Druck Ltd Improved sensor
ATE407351T1 (de) * 2003-02-05 2008-09-15 Univ Brunel Resonanzsensorbaugruppe
JP4359757B2 (ja) * 2003-09-17 2009-11-04 ソニー株式会社 情報表示装置
US7032454B2 (en) * 2004-03-05 2006-04-25 Agilent Technologies, Inc. Piezoelectric cantilever pressure sensor array
US7498728B2 (en) 2006-06-21 2009-03-03 Pressure Systems, Inc. Vibrating beam force sensor of improved ruggedness and mountability
WO2008081181A1 (en) * 2006-12-28 2008-07-10 Highland Biosciences Limited Biosensor
GB0716542D0 (en) * 2007-08-24 2007-10-03 Highland Biosciences Ltd Endotoxin biosensor
DE102008037572A1 (de) 2008-01-29 2009-08-06 Werner Turck Gmbh & Co. Kg Kraftsensor
US20130201316A1 (en) 2012-01-09 2013-08-08 May Patents Ltd. System and method for server based control
JP2014020785A (ja) * 2012-07-12 2014-02-03 Seiko Epson Corp 圧力検出デバイス、電子機器、移動体
US10580605B2 (en) 2015-11-23 2020-03-03 University Of Utah Research Foundation Very low power microelectromechanical devices for the internet of everything
CN111149141A (zh) 2017-09-04 2020-05-12 Nng软件开发和商业有限责任公司 用于收集并使用来自交通工具的传感器数据的方法和装置
DE102017121347A1 (de) 2017-09-14 2019-03-14 Turck Holding Gmbh Schlauchdrucksensor für eine Schlauchpumpenanordnung
CH718762A1 (de) * 2021-06-23 2022-12-30 Digi Sens Holding Ag Schwingbrücke für einen Schwingsaitensensor und Schwingsaitensensor.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB823847A (en) * 1955-11-11 1959-11-18 Ferranti Ltd Improvements relating to transducers
US3190129A (en) * 1961-07-10 1965-06-22 Bosch Arma Corp Accelerometer and parts therefor
GB1181515A (en) * 1966-05-18 1970-02-18 Solartron Electronic Group Improvements in or relating to Force-Measuring Apparatus.
US3470400A (en) * 1967-12-21 1969-09-30 Singer General Precision Single beam force transducer with integral mounting isolation
US4071838A (en) * 1976-02-09 1978-01-31 Diax Corporation Solid state force transducer and method of making same
US4215570A (en) * 1979-04-20 1980-08-05 The United States Of America As Represented By The United States Department Of Energy Miniature quartz resonator force transducer
JPS596370B2 (ja) * 1979-05-11 1984-02-10 横河電機株式会社 力変換機構
US4372173A (en) * 1980-10-20 1983-02-08 Quartex, Inc. Resonator force transducer
US4446394A (en) * 1981-09-14 1984-05-01 The Singer Company Linearizing mechanism for a vibrating beam force transducer
GB2115551B (en) * 1982-02-09 1985-11-13 Itt Ind Ltd Load sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010109787A1 (ja) * 2009-03-27 2010-09-30 パナソニック株式会社 物理量センサ
JP2010230490A (ja) * 2009-03-27 2010-10-14 Panasonic Corp 物理量センサ

Also Published As

Publication number Publication date
EP0130705B1 (en) 1989-11-08
US4594898A (en) 1986-06-17
JPS6069528A (ja) 1985-04-20
DE3480425D1 (en) 1989-12-14
EP0130705A2 (en) 1985-01-09
GB2141231B (en) 1986-08-06
EP0130705A3 (en) 1986-02-26
GB2141231A (en) 1984-12-12
GB8315565D0 (en) 1983-07-13

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term